압전재료를 이용한 SAW온도센서의 제작 및 특성에 대한 연구

초록

In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128°YX-LiNbO3 Substrate. The frequency responses of SAW sensors on the temperature change are compared. To measure the change of center frequency, two center frequencies on the 3dB and 20dB are measured and compared. Since the center frequency on the temperature change from -30℃ to 80℃ is linearly changed, the SAW sensor is applicable to the temperature sensor.