Characterization of the optical and structural properties for low-emissivity filters with Ti, TiOx, and ITO barrier layers

초록

Low-emmisivity(low-e) filters with the multiple repeatition of a basic [TiO2/barrier layer/AG/TiO2] structure were designed for display applications and fabricated by using radio-frequency magnetron sputtering. The effects of Ti, TiOx and ITO films used as barrier layers protecting the Ag layers on the optical and electrical properties of the low-e filters were investigated by using various analytical tools. The results show that filters with TiOx and ITO barrier layers showed higher transmittance in the visible, better NIR cut-off ability, and a smoother surface than those with Ti metal barrier layers, suggesting that the ITO and TiOx films can be used as the good barrier layers for low-e filters.