Porous Si/SnO2 nanowires heterostructures for H2S gas sensing

Bang, Jae Hoon; Choi, Myung Sik; Mirzaei, Ali; Oum, Wansik; Han, Seungmin; Kim, Sang Sub; Kim, Hyoun Woo

doi:10.1016/j.ceramint.2019.09.010

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Porous Si/SnO2 nanowires heterostructures for H2S gas sensing

Bang, Jae Hoon;
Choi, Myung Sik;
Mirzaei, Ali;
Oum, Wansik;
Han, Seungmin;
... Kim, Sang Sub;
외 1명

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73

초록

In this work, a low-temperature (100 degrees C) gas sensor based on heterojunctions of porous Si and SnO2 nanowires (NWs) is presented. Porous Si was obtained from p-Si wafers by electrochemical etching, and SnO2 NWs were fabricated by a vapor-liquid-solid route. Different characterization techniques were used to verify the formation of porous Si/SnO2 NW heterojunctions. H2S gas sensing results showed enhanced gas sensing performance of the porous Si/SnO2 NW sensor in comparison with that of a porous Si sensor. The reasons for such enhancement are discussed in detail. This study demonstrates the promising effects of SnO2 NWs in combination with porous Si to realize low-temperature H2S gas sensors that are highly compatible with existing Si processing technology.

키워드

Porous Si; SnO2 NWs; H2S gas; Gas sensor; Sensing mechanism; NANOSTRUCTURED MATERIALS; SILICON NANOWIRES; SENSORS; OXIDE; MICROSTRUCTURE; LAYER; CO3O4

제목: Porous Si/SnO2 nanowires heterostructures for H2S gas sensing

저자: Bang, Jae Hoon; Choi, Myung Sik; Mirzaei, Ali; Oum, Wansik; Han, Seungmin; Kim, Sang Sub; Kim, Hyoun Woo

DOI: 10.1016/j.ceramint.2019.09.010

발행일: 2020-01

유형: Article

저널명: Ceramics International

권: 46

호: 1

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