ScholarWorks@인하대학교

상세 보기

Fabrication of microstructure by deep RIE etched Si master and PDMS mold

Fabrication of microstructure by deep RIE etched Si master and PDMS mold
  • LEE EL HANG
제목
Fabrication of microstructure by deep RIE etched Si master and PDMS mold
제목 (타언어)
Fabrication of microstructure by deep RIE etched Si master and PDMS mold
저자
LEE EL HANG
학회명
한국반도체 학술대회 2006

ScholarWorks@인하대학교

22212 인천광역시 미추홀구 인하로 100 정석학술정보관 Tel. 032-860-9003

COPYRIGHT © 인하대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.