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Realization of Various Sub-micron Metal Patterns using Room Temperature Nanoimprint Lithography
Realization of Various Sub-micron Metal Patterns using Room Temperature Nanoimprint Lithography
- 제목
- Realization of Various Sub-micron Metal Patterns using Room Temperature Nanoimprint Lithography
- 제목 (타언어)
- Realization of Various Sub-micron Metal Patterns using Room Temperature Nanoimprint Lithography
- 저자
- O BEOM HOAN
- 학회명
- DPS 2005