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Investigation of plasma resistance material with y-si-al-o-n oxynitride glass

  • KIM HYUNG SUN
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Investigation of plasma resistance material with y-si-al-o-n oxynitride glass
저자
KIM HYUNG SUN
학회명
춘계재료학회
개최지
천안 상록리조트
학회 개최일
2008-05-22 ~ 2008-05-23

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