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Silicon Etch for Nano-photonic Structure using Hydrogen Silsesquioxane(HSQ) as a Direct Etch Mask
Silicon Etch for Nano-photonic Structure using Hydrogen Silsesquioxane(HSQ) as a Direct Etch Mask
- 제목
- Silicon Etch for Nano-photonic Structure using Hydrogen Silsesquioxane(HSQ) as a Direct Etch Mask
- 제목 (타언어)
- Silicon Etch for Nano-photonic Structure using Hydrogen Silsesquioxane(HSQ) as a Direct Etch Mask
- 저자
- O BEOM HOAN
- 학회명
- AVS 2005