A study on the distinguishing method of nanobumps and nanoholes structure by difference of backscattering characteristics

초록

Scattering behaviors of nanostructures and its near and far field characteristics have amount of interests in various areas. such as metasurface, surface spectroscopy, wavelength filter and defect detector. There are many ways to check the presence of nano defects, but the method of figure out the type of defect has not been studied. This method is not usually considered as important, but each nanostructures have very different scattering properties, so it can be main purpose in certain cases. In this study, we simulate light scattered by 2 types of nanostructures in different conditions such as incident angle, polarization and wavelength. Then we find a way to distinguish structures and we explore the best combinations of angle, polarization and wavelength for it.