Kinetic Monte Carlo(KMC) for Understanding Boron Up-hill Diffusion after Germanium Pre-amorphization

  • WON TAEYOUNG
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Kinetic Monte Carlo(KMC) for Understanding Boron Up-hill Diffusion after Germanium Pre-amorphization
저자
WON TAEYOUNG
학회명
IEEE 2006 Silicon Nanoelectronics Workshop