Fabrication of Homogeneous Porous Layers of Silicon Wafers by Electrochemical Anodic Etching

  • CHO NAMHEE
제목
Fabrication of Homogeneous Porous Layers of Silicon Wafers by Electrochemical Anodic Etching
저자
CHO NAMHEE
학회명
IUMRS-ICA 2012
학회 개최일
2012-08-26 ~ 2012-08-31