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Fabrication and Characterization by Heat Treatment Temperatureof SiOC Low-k Dielectric Film

  • KIM HYUNG SUN
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Fabrication and Characterization by Heat Treatment Temperatureof SiOC Low-k Dielectric Film
저자
KIM HYUNG SUN
학회명
2009 한국세라믹학회(춘계)
개최지
포스코 국제관

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