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Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis

  • KIM HYUNG SUN
제목
Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis
저자
KIM HYUNG SUN
학회명
The 26th International Japan-Korea Seminar on Ceramics
개최지
Tsukuba, Ibaraki, Japan

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