통계적 실험계획법을 이용한 광학벤치 설계규칙의 설정

초록

In order to set up the design rule of micro optical bench, optical coupling efficiencies of two sets of test benches are calculated. Simple linear connections of incoming and outgoing optical fibers with and without ball lenses are designed. Positional errors that are possible in actual fabrication processes are considered in the calculations and their tolerances are determined from 3dB conditions. For a simple fiber-to-fiber connection, the working distance is limited to 2.7 um and tilt error 5.8°. When ball lenses are located in front of each fiber, the working distance can be extended over 60 um, but the positional errors have the strong interaction among position parameters and thus should be considered simultaneously for tolerance design