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Design and fabrication of a polymer-based micron-scale semi-spherical vertical interconnecting structure for 3D photonic integrated circuit application

  • PARK SEGEUN
제목
Design and fabrication of a polymer-based micron-scale semi-spherical vertical interconnecting structure for 3D photonic integrated circuit application
저자
PARK SEGEUN
학회명
Photonics West 2005

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