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Dependence of the dielectric properties of Pt/ZrO2/Si capacitors prepared by rf-magnetron sputtering on the Oxygen partial pressure and the annealing temperature

  • CHONGMU LEE
제목
Dependence of the dielectric properties of Pt/ZrO2/Si capacitors prepared by rf-magnetron sputtering on the Oxygen partial pressure and the annealing temperature
저자
CHONGMU LEE
학회명
Eco-materials processing and designⅧ

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