Nd:YAG 레이저 빔에 의한 PDP 방전셀의 구조 형성

초록

The PDP(Plasma Display Panel) barrier rib material on the glass substrate was patterned for fabrication of the PDP cell using Nd:YAG laser(1064 ㎚) which can generate the second(532 ㎚) and forth(266 ㎚) harmonic wave by HGM(harmonic generation modules). At a scan speed of 20 ㎛/s with the second harmonic wave(532 ㎚) of Nd:YAG laser, the etching threshold laser fluence of the PDP material was 6.5 mJ/㎠ and a sample(thickness = 180 ㎛) on the glass substrate was removed clearly at a laser fluence of 19.5 J/㎠. In order to increase the throughput of the fabrication we divided a single-beam into multi-beams by using a metal mask between the sample and the focusing lens. As a result, 10 lines of PDP cell were formed by one laser beam scanning at a scan speed of 200 ㎛/s and a laser fluence of 2.86 J/㎠.