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한국세라믹학회지
ISSN
P 1229-7801 E 2234-0491
출판사
한국세라믹학회 SPRINGER HEIDELBERG
국가
SOUTH KOREA
발행 상태
활성
데이터베이스 수록 정보
ESCI 2017-2020 (4년)
KCI 2009-2019 (11년)
KCI 등재 2001-2021 (21년)
KCI 등재후보 1998-2000 (3년)
SCIE 2020-2021 (2년)
Scopus 2017-2020 (4년)
SJR 2008-2019 (12년)
전체 4건 중 1번부터 4번까지의 결과를 표시합니다.
2023
Article
Two-Step Cyclic Etching of Copper Thin Films Using Acetylacetone/O2 Gases
- Kim, Seung Hyun ;
- Lim, Eun Taek ;
- Park, Sung Yong ;
- Chung, Chee Won
- 2023-07-01
- ECS Journal of Solid State Science and Technology
- Electrochemical Society, Inc.
Article
Fast Response-Recovery and High Selectivity Chemicapacitive Detection of a Nerve Agent Simulant Vapor
- Kang, Miae ;
- Park, Jin Hyun ;
- Kim, Ayeong ;
- Lee, Seongwoo ;
- Lee, Chang Young ;
- ... Kim, Joo-Hyung ;
- 외 3명
- 2023-06-01
- ECS Journal of Solid State Science and Technology
- Electrochemical Society, Inc.
2021
Article
Etch Characteristics of Copper Thin Films in Inductively Coupled Plasma of Piperidine/Ethanol/Ar Gas Mixture
- Lim, Eun Taek ;
- Lee, Ji Soo ;
- Park, Sung Yong ;
- Chung, Chee Won
- 2021-05-01
- ECS Journal of Solid State Science and Technology
- Electrochemical Society, Inc.
2018
Article
Influence of C2F6 Addition to Cl2/Ar Gas on Nanometer-Scale Etch Characteristics of TiN Thin Films Using Inductively Coupled Plasma
- Choi, Jae Sang ;
- Cho, Doo Hyeon ;
- Lim, Eun Taek ;
- Chung, Chee Won
- 2018
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC