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Effects of Etch Parameters on Etching of CoFeB Thin Films in CH4/O2/Ar Mix

제목
Effects of Etch Parameters on Etching of CoFeB Thin Films in CH4/O2/Ar Mix
저자
CHUNG CHEE WON
학회명
제42회 한국진공학회 동계학술대회
개최지
보광휘닉스파크
학회 개최일
2012-02-08 ~ 2012-02-10

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