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Effect of oxygen concentration on the high density plasma reactive ion etching of molybdenum thin films in halogen/O2/Ar gas mixture
- 제목
- Effect of oxygen concentration on the high density plasma reactive ion etching of molybdenum thin films in halogen/O2/Ar gas mixture
- 저자
- CHUNG CHEE WON
- 학회명
- The 14th ICAMD
- 개최지
- Bexco, Busan 8-12, 2025
- 학회 개최일
- 2025-12-08 ~ 2025-12-12