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HIGH DENSITY PLASMA ETCHING OF CoFeSiB MAGNETIC FILMS WITH HARD MASK
- 제목
- HIGH DENSITY PLASMA ETCHING OF CoFeSiB MAGNETIC FILMS WITH HARD MASK
- 저자
- CHUNG CHEE WON
- 학회명
- International Symposium on Spintronics and Advanced Magnetic Technologies and International Symposium on Magnetic Materials and Applications 2005