상세 보기
Dry Etching of Magnetic Tunnel Junction Stack Using a High Density Plasma of a Cl2/Ar Gas Mix
- 제목
- Dry Etching of Magnetic Tunnel Junction Stack Using a High Density Plasma of a Cl2/Ar Gas Mix
- 저자
- CHUNG CHEE WON
- 학회명
- 14th International Symposium on Intercalation Compounds