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Effect of Post-Metallization Annealing in Oxygen Ambient on Tungsten Metal for Back-End-Of-Line(BEOL) Compatible Amorphous IGZO Transistors

제목
Effect of Post-Metallization Annealing in Oxygen Ambient on Tungsten Metal for Back-End-Of-Line(BEOL) Compatible Amorphous IGZO Transistors
저자
Geum, Daemyeong
학회명
KCS 2025

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