Etch Characteristics of IrMn Thin Films Using an Inductively Coupled Plasma of CH3OH/Ar

제목
Etch Characteristics of IrMn Thin Films Using an Inductively Coupled Plasma of CH3OH/Ar
저자
CHUNG CHEE WON
학회명
International Conference of The Asian Union of Magnetics Societies 2010
개최지
Lotte Hotel Jeju
학회 개최일
2010-12-05 ~ 2010-12-08