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Etch Characteristics of IrMn Thin Films Using an Inductively Coupled Plasma of CH3OH/Ar
- 제목
- Etch Characteristics of IrMn Thin Films Using an Inductively Coupled Plasma of CH3OH/Ar
- 저자
- CHUNG CHEE WON
- 학회명
- International Conference of The Asian Union of Magnetics Societies 2010
- 개최지
- Lotte Hotel Jeju
- 학회 개최일
- 2010-12-05 ~ 2010-12-08