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FABRICATION OF MAGNETIC TUNNEL JUNCTION STACK USING HIGH DENSITY PLASMA ETCHING IN Cl2/Ar AND BCl3/Ar GASES

제목
FABRICATION OF MAGNETIC TUNNEL JUNCTION STACK USING HIGH DENSITY PLASMA ETCHING IN Cl2/Ar AND BCl3/Ar GASES
저자
CHUNG CHEE WON
학회명
The 18th International Symposium on Integrated Ferroelectrics

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