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Inductively Coupled Plasma Reactive Ion Etching of Gallium Indium Zinc Oxide Thin Films in Cl2/Ar Gas Mix
- 제목
- Inductively Coupled Plasma Reactive Ion Etching of Gallium Indium Zinc Oxide Thin Films in Cl2/Ar Gas Mix
- 저자
- CHUNG CHEE WON
- 학회명
- The 31st International Symposium on Dry Process (DPS)
- 개최지
- Bexco convention center
- 학회 개최일
- 2009-09-24 ~ 2009-09-25