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Nanometer-scale Etch Characteristics of TiN Thin Films using Inductively Coupled Plasma of Cl2/C2F6/Ar
- 제목
- Nanometer-scale Etch Characteristics of TiN Thin Films using Inductively Coupled Plasma of Cl2/C2F6/Ar
- 저자
- CHUNG CHEE WON
- 학회명
- The 64th American Vacuum Society
- 개최지
- Tampa, Florida
- 학회 개최일
- 2017-10-30 ~ 2017-11-03