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High Density Plasma Etching of Copper Thin Films in a Piperidine/O2/Ar Plasma

제목
High Density Plasma Etching of Copper Thin Films in a Piperidine/O2/Ar Plasma
저자
CHUNG CHEE WON
학회명
제28회 한국반도체학술대회
개최지
온라인
학회 개최일
2021-01-25 ~ 2021-01-29

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