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Inductively Coupled Plasma Reactive Ion Etching of CoFeB Thin Films Using a CH3COOH/Ar Gas Mixture
- 제목
- Inductively Coupled Plasma Reactive Ion Etching of CoFeB Thin Films Using a CH3COOH/Ar Gas Mixture
- 저자
- CHUNG CHEE WON
- 학회명
- Pacific Rim Symposium on Surfaces, Coatings & Interfaces
- 개최지
- Hawaii
- 학회 개최일
- 2014-12-07 ~ 2014-12-11