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Anisotropic etching of CoFeB magnetic thin films in C2H5OH/Ar plasma
- 제목
- Anisotropic etching of CoFeB magnetic thin films in C2H5OH/Ar plasma
- 저자
- CHUNG CHEE WON
- 학회명
- The 6th International Conference on Microelectronics and Plasma Technology
- 개최지
- Gyeongju, Korea
- 학회 개최일
- 2016-09-26 ~ 2016-09-29