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Investigation on Etch Characteristics of MgO thin films Using a HBr/Ar Plasma
- 제목
- Investigation on Etch Characteristics of MgO thin films Using a HBr/Ar Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST)
- 개최지
- Lotte Hotel Jeju
- 학회 개최일
- 2010-07-04 ~ 2010-07-08