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Dry etching of copper thin films in high density plasma of organic acids
- 제목
- Dry etching of copper thin films in high density plasma of organic acids
- 저자
- CHUNG CHEE WON
- 학회명
- The 7th International Conference on Microelectronics and Plasma Technology
- 개최지
- Songdo, Convensia
- 학회 개최일
- 2018-07-24 ~ 2018-07-28