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Etch Characteristic of Gallium Indium Zinc Oxide Thin Films Using Inductively Coupled Plasma Reactive Ion Etching in Chlorined Based Gases
- 제목
- Etch Characteristic of Gallium Indium Zinc Oxide Thin Films Using Inductively Coupled Plasma Reactive Ion Etching in Chlorined Based Gases
- 저자
- CHUNG CHEE WON
- 학회명
- The 29th International Symposium on Dry Process