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Nano Etching of TiN Thin Films with Nanometer-Sized Patterns Using Inductively Coupled Plasma Reactive Ion Etching
- 제목
- Nano Etching of TiN Thin Films with Nanometer-Sized Patterns Using Inductively Coupled Plasma Reactive Ion Etching
- 저자
- CHUNG CHEE WON
- 학회명
- 제14회 국제나노기술심포지엄 (Nano Korea 2016 symposium)
- 개최지
- 킨텍스, 일산
- 학회 개최일
- 2016-07-13 ~ 2016-07-15