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Investigation on Etch Characteristics of Nanometer-Sized Magnetic Tunnel Junction Stacks Using a HBr/Ar Plasma
- 제목
- Investigation on Etch Characteristics of Nanometer-Sized Magnetic Tunnel Junction Stacks Using a HBr/Ar Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- 10th International Conference on Nanotechnology and IEEE Nano 2010
- 개최지
- Kintex, Seoul
- 학회 개최일
- 2010-08-17 ~ 2010-08-20