상세 보기
Comparison of Etch Characteristics of CoFeB Magnetic Thin Films Using CH3OH, CH4 and H2O Plasmas
- 제목
- Comparison of Etch Characteristics of CoFeB Magnetic Thin Films Using CH3OH, CH4 and H2O Plasmas
- 저자
- CHUNG CHEE WON
- 학회명
- 35th International Symposium on Dry Process
- 개최지
- Jeju
- 학회 개최일
- 2013-08-29 ~ 2013-08-30