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High Density Plasma Reactive Ion Etching of Cobalt Thin Films Using Acetylacetone/Ar Gas mixture
- 제목
- High Density Plasma Reactive Ion Etching of Cobalt Thin Films Using Acetylacetone/Ar Gas mixture
- 저자
- CHUNG CHEE WON
- 학회명
- The 12th Vacuum and Surface Science Conference of Asia and Australia
- 개최지
- Taipei internaional convention center
- 학회 개최일
- 2024-10-13 ~ 2024-10-17