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Effect of Non-Corrosive Gas Mixture on Properties of Etched CoFeB Alloys Using Inductively Coupled Plasma Reactive Ion Etching
- 제목
- Effect of Non-Corrosive Gas Mixture on Properties of Etched CoFeB Alloys Using Inductively Coupled Plasma Reactive Ion Etching
- 저자
- CHUNG CHEE WON
- 학회명
- 제24회 한국반도체 학술대회
- 개최지
- 강원도 대명비발디파크
- 학회 개최일
- 2017-02-13 ~ 2017-02-15