상세 보기
Influence of Additive Gases to Organic Chelators on Etch Characteristics of Copper Thin Films Using Inductively Coupled Plasma Reactive Ion Etching
- 제목
- Influence of Additive Gases to Organic Chelators on Etch Characteristics of Copper Thin Films Using Inductively Coupled Plasma Reactive Ion Etching
- 저자
- CHUNG CHEE WON
- 학회명
- 제28회 한국반도체학술대회
- 개최지
- 온라인
- 학회 개최일
- 2021-01-25 ~ 2021-01-29