Dry etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas Mixture

제목
Dry etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas Mixture
저자
CHUNG CHEE WON
학회명
International Conference on Chemical, Metallurgy and Material Science Engineering (CMMSE-2015)
개최지
Pattaya
학회 개최일
2015-08-10 ~ 2015-08-11