Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching

제목
Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching
저자
CHUNG CHEE WON
학회명
International Conference of The Asian Union of Magnetics Societies 2010
개최지
Lotte Hotel Jeju
학회 개최일
2010-12-05 ~ 2010-12-08