상세 보기
Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching
- 제목
- Etch Characteristics of FePt Magnetic Thin Films Using Inductively Coupled Plasma Reactive Ion Etching
- 저자
- CHUNG CHEE WON
- 학회명
- International Conference of The Asian Union of Magnetics Societies 2010
- 개최지
- Lotte Hotel Jeju
- 학회 개최일
- 2010-12-05 ~ 2010-12-08