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Study on Deuterium-Based Post-Metallization Annealing for InGaAs/lnAIAs Metamorphic High Electron Mobility Transistors
- 제목
- Study on Deuterium-Based Post-Metallization Annealing for InGaAs/lnAIAs Metamorphic High Electron Mobility Transistors
- 저자
- Geum, Daemyeong
- 학회명
- 한국 반도체 학술대회 (KCS)