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Etch Characteristics of Nanometer-scale Patterned Cu Thin Film Using Pulse modulated RF Source Plasma
- 제목
- Etch Characteristics of Nanometer-scale Patterned Cu Thin Film Using Pulse modulated RF Source Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- The 65th American Vacuum Society
- 개최지
- Long Beach Convention Center, CA, USA
- 학회 개최일
- 2018-10-21 ~ 2018-10-26