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Etch Characteristics of Magnetic Tunnel Junction Stack Using a High Density Plasma in a HBr/Ar Gas
- 제목
- Etch Characteristics of Magnetic Tunnel Junction Stack Using a High Density Plasma in a HBr/Ar Gas
- 저자
- CHUNG CHEE WON
- 학회명
- The 1st International Symposium on Advanced Magnetic Materials