상세 보기
Effect of C2F6 Gas on Etch Profile of Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Gas Mixures
- 제목
- Effect of C2F6 Gas on Etch Profile of Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Gas Mixures
- 저자
- CHUNG CHEE WON
- 학회명
- The 29th International Symposium on Dry Process