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Inductively Coupled Plasma Reactive Ion Etching of Cobalt Thin Films Using Halogen Gas
- 제목
- Inductively Coupled Plasma Reactive Ion Etching of Cobalt Thin Films Using Halogen Gas
- 저자
- CHUNG CHEE WON
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2023
- 개최지
- Busan, Paradise Hotel
- 학회 개최일
- 2023-11-19 ~ 2023-11-23