상세 보기
Dry Etching of Co Thin Films Using High Density Plasma of Organic Gases
- 제목
- Dry Etching of Co Thin Films Using High Density Plasma of Organic Gases
- 저자
- CHUNG CHEE WON
- 학회명
- American Vacuum Society 68th International symposium & exhibition
- 개최지
- Pittsburgh, Pennsylvania
- 학회 개최일
- 2022-11-06 ~ 2022-11-11