상세 보기
Investigation on etch characteristics of Palladium thin films using CH3COOH/Ar gas
- 제목
- Investigation on etch characteristics of Palladium thin films using CH3COOH/Ar gas
- 저자
- CHUNG CHEE WON
- 학회명
- The 6th International Conference on Microelectronics and Plasma Technology
- 개최지
- Gyeongju, Korea
- 학회 개최일
- 2016-09-26 ~ 2016-09-29