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Exploring ultrathin SnO2 films via atomic layer deposition for facilitating the formation of the rutile TiO2 phase
- 제목
- Exploring ultrathin SnO2 films via atomic layer deposition for facilitating the formation of the rutile TiO2 phase
- 저자
- In-Hwan Baek
- 학회명
- ALD/ALE 2025
- 개최지
- 제주 ICC