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Inductively Coupled Plasma Reactive Ion Etching of GeSbTe Thin Films in a HBr/Ar Gas
- 제목
- Inductively Coupled Plasma Reactive Ion Etching of GeSbTe Thin Films in a HBr/Ar Gas
- 저자
- CHUNG CHEE WON
- 학회명
- The 18th International Symposium on Integrated Ferroelectrics