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Effect of organic gas mixture on Etching of Nanometer-Scale Patterned Cu Thin Film Using Pulsed Modulated Plasma
- 제목
- Effect of organic gas mixture on Etching of Nanometer-Scale Patterned Cu Thin Film Using Pulsed Modulated Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- NANO KOREA 2021 The 19th International Sanotech Symposium & Exhibition
- 개최지
- 온라인
- 학회 개최일
- 2021-07-07 ~ 2021-07-09